公开(公告)号：US6432214B2

公开(公告)日：2002-08-13

申请号：US11344098

申请日：1998-07-10

Applicant: SEMITOOL INC

Inventor： BRYER CHARLES JAMES ,  BEXTEN DANIEL P ,  NORBY JERRY R

IPC: B08B3/02 ,  H01L21/00 ,  B08B7/04

CPC classification number: H01L21/6704 ,  B08B3/02 ,  Y10S134/902

Abstract: A machine for cleaning containers has inside and outside arrays of nozzles arranged to spray a cleaning solution onto containers supported on a spinning rotor. Used cleaning solution is diverted to a reclaim tank for reuse, thereby allowing low-cost cleaning with concentrated chemicals, and with the creation of less liquid waste requiring disposal. In a method for removing contaminants from flat media or silicon wafer containers or carriers, a mixture of surfactant and de-ionized water is sprayed onto containers on a spinning rotor. The used cleaning solution is collected, filtered and reused.

Abstract translation: 用于清洁容器的机器具有内部和外部喷嘴阵列，布置成将清洁溶液喷射到支撑在旋转转子上的容器上。 使用的清洁溶液被转移到回收罐中以便重新使用，从而允许使用浓缩的化学品进行低成本的清洁，并且减少需要处理的废液。 在从平坦介质或硅晶片容器或载体中除去污染物的方法中，将表面活性剂和去离子水的混合物喷雾到旋转转子上的容器上。 使用过的清洁溶液被收集，过滤并重复使用。