公开(公告)号：US20240425355A1

公开(公告)日：2024-12-26

申请号：US18242132

申请日：2023-09-05

Applicant: SENSORTEK TECHNOLOGY CORP.

Inventor： Shih-Hsiung TSENG ,  Shih-Wei LEE ,  Chao-Shiun WANG

IPC: B81B3/00 ,  G01C19/5712

Abstract: The present application provides a three-axis gyroscope, which comprises a substrate on which a first plate element, a second plate element, a third plate element, a first drive module, and a second drive module are disposed. The first driving module, the first plate element, the second plate element, the third plate element and the second driving module are disposed in an axial direction. Thereby, problems caused by use of frames and coupling flexible structures of three-axis gyroscopes available now may be solved effectively.

公开(公告)号：US20240425357A1

公开(公告)日：2024-12-26

申请号：US18242136

申请日：2023-09-05

Applicant: SENSORTEK TECHNOLOGY CORP.

Inventor： Shih-Yuan LIU ,  Chao-Shiun WANG ,  Shih-Wei LEE

IPC: B81B3/00

Abstract: The present application provides an inertial sensor, which comprising an anchor point, a first sensing proof mass, and a second sensing proof mass. The first sensing proof mass and the second sensing proof mass are connected with the anchor point by a corresponding flexible member. Each of the first sensing proof mass and the second sensing proof mass is provided with a groove to create mass imbalance on two sides of the flexible member for sensing accelerations in an out-of-plane direction. By mounting electrodes in a plane direction and in the grooves, in-plane accelerations orthogonal to each other are sensed.