公开(公告)号：US20240425357A1

公开(公告)日：2024-12-26

申请号：US18242136

申请日：2023-09-05

Applicant: SENSORTEK TECHNOLOGY CORP.

Inventor： Shih-Yuan LIU ,  Chao-Shiun WANG ,  Shih-Wei LEE

IPC: B81B3/00

Abstract: The present application provides an inertial sensor, which comprising an anchor point, a first sensing proof mass, and a second sensing proof mass. The first sensing proof mass and the second sensing proof mass are connected with the anchor point by a corresponding flexible member. Each of the first sensing proof mass and the second sensing proof mass is provided with a groove to create mass imbalance on two sides of the flexible member for sensing accelerations in an out-of-plane direction. By mounting electrodes in a plane direction and in the grooves, in-plane accelerations orthogonal to each other are sensed.