ILLUMINATION SYSTEM, ILLUMINATION METHOD, AND INSPECTION SYSTEM
    1.
    发明申请
    ILLUMINATION SYSTEM, ILLUMINATION METHOD, AND INSPECTION SYSTEM 审中-公开
    照明系统,照明方法和检查系统

    公开(公告)号:US20130169795A1

    公开(公告)日:2013-07-04

    申请号:US13729434

    申请日:2012-12-28

    CPC classification number: H05B37/02 H05B41/3928 Y02B20/202

    Abstract: An illumination system includes a first illumination unit which uses an amount of illumination light in accordance with a set amount of light to illuminate an illuminated object, a second illumination unit which has a response to switching of the set amount of light better than said first illumination unit and which uses illumination light which is superposed on the illumination light from said first illumination unit to illuminate said illuminated object, and an illumination controller which controls the amount of illumination light of said second illumination unit by switching the set amount of light in accordance with the control information while maintaining the amount of illumination light of said first illumination unit at a predetermined amount.

    Abstract translation: 照明系统包括:第一照明单元,其使用根据设定量的照明照明物体的照明光量;第二照明单元,其对所设定的光量的转换比所述第一照明更好地响应 并且其使用重叠在来自所述第一照明单元的照明光上以照亮所述被照明物体的照明光;照明控制器,其通过根据所述第一照明单元切换所述设定光量来控制所述第二照明单元的照明光量 控制信息,同时将所述第一照明单元的照明光量保持在预定量。

    INSPECTION SYSTEM AND INSPECTION METHOD
    2.
    发明申请
    INSPECTION SYSTEM AND INSPECTION METHOD 审中-公开
    检查系统和检查方法

    公开(公告)号:US20130169793A1

    公开(公告)日:2013-07-04

    申请号:US13729441

    申请日:2012-12-28

    CPC classification number: H04N7/18 G01N21/896

    Abstract: An inspection system captures an inspected object which is illuminated by an illumination system and processes an image of the inspected object which is expressed by the obtained image data to inspect it. The inspection system includes a processing information determining portion determining processing information which is used for the inspection processing which changes along with the change of the amount of illumination light from the illumination system from the initial amount of light to the target amount of light when the set amount of light of the illumination system is changed from the initial amount of light to the target amount of light, and which system performs the inspection processing by using processing information which is determined by the processing information determining means in accordance with the elapsed time from when the set amount of light of the illumination system is switched to the target amount of light.

    Abstract translation: 检查系统捕获由照明系统照明的被检查物体,并处理由所获得的图像数据表示的检查对象的图像以进行检查。 检查系统包括处理信息确定部分确定用于检查处理的处理信息,该处理信息随着照射系统的照明光量从初始光量到目标光量的变化而变化,当该组 照明系统的光量从初始光量改变为目标光量,并且该系统通过使用由处理信息确定装置根据从当前时间起经过的时间确定的处理信息来执行检查处理 将照明系统的设定光量切换到目标光量。

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