公开(公告)号：US20210088155A1

公开(公告)日：2021-03-25

申请号：US16925007

申请日：2020-07-09

Applicant: Shimadzu Corporation

Inventor： Wenjian LU ,  Shigeaki SHIBAMOTO ,  Kazunori TAKAHASHI ,  Ayaka SATO

IPC: F16K99/00

Abstract: Provided is a micro-valve having a laminate structure capable of improving sealing performance when a foreign substance is mixed. The micro-valve 10 has a laminate structure and includes a base layer 20 and a diaphragm layer 30. The base layer is formed with an inlet port 23 for introducing a gas into the micro-valve and an outlet port for allowing the gas to flow outside. The diaphragm layer is arranged to face the base layer. The diaphragm layer switches the flowing and blocking of the gas from the inlet port to the outlet port by elastic deformation thereof. The diaphragm layer has a configuration in which a plurality of deformation regions 33 and a plurality of rigid body regions 34 are alternately formed, the deformation region being elastically deformable in accordance with an inflow of a pneumatic fluid into the micro-valve. The diaphragm layer closes at least one of the inlet port and the outlet port by elastic deformation of at least a part of the plurality of deformation regions.

公开(公告)号：US20210010982A1

公开(公告)日：2021-01-14

申请号：US16885981

申请日：2020-05-28

Applicant: Shimadzu Corporation

Inventor： Kazunori TAKAHASHI

IPC: G01N30/34

Abstract: An analyzer capable of suppressing the generation of noise in a current detection circuit is provided. On a board 61, a current detection circuit 60 for processing an output signal from a detector is mounted. The cover member 63 has a space 630 in which the current detection circuit 60 is accommodated. A gas is supplied from a gas source into the space 630. The cover member 63 is provided with an inlet port 633 for introducing the gas from the gas source into the space 630 and an outlet port 634 for discharging the gas in the space 630.

公开(公告)号：US20150316937A1

公开(公告)日：2015-11-05

申请号：US14761972

申请日：2013-01-28

Applicant: SHIMADZU CORPORATION

Inventor： Minoru KASHIHARA ,  Kazunori TAKAHASHI ,  Jun YANAGIBAYASHI ,  Takahiro NISHIMOTO

IPC: G05D16/20 ,  F16K31/04

CPC classification number: G05D16/2013 ,  F16K31/004 ,  G05D7/0694 ,  Y10T137/7761

Abstract: A pressure controller is provided with an insulating substrate having a gas inlet and a gas outlet and including an inner channel, a valve mechanism including an MEMS valve element that is attached directly to a front surface or a back surface of the insulating substrate and that is connected to the inner channel via a port communicating with the inner channel, a pressure sensor section including an MEMS pressure sensor element that is attached directly to the front surface or the back surface of the insulating substrate and that is connected to the inner channel via a port communicating with the inner channel, and a control section for feedback-controlling the valve mechanism based on a detection signal of the pressure sensor section.

Abstract translation: 压力控制器设置有具有气体入口和气体出口并包括内部通道的绝缘基板，包括直接连接到绝缘基板的前表面或后表面的MEMS阀元件的阀机构， 通过与所述内部通道连通的端口连接到所述内部通道;压力传感器部分，包括直接连接到所述绝缘基板的前表面或背面的MEMS压力传感器元件，并且经由所述内部通道连接到所述内部通道 与内部通道连通的端口，以及用于基于压力传感器部分的检测信号反馈控制阀机构的控制部分。

公开(公告)号：US20200300794A1

公开(公告)日：2020-09-24

申请号：US16082817

申请日：2016-03-07

Applicant: SHIMADZU CORPORATION

Inventor： Kazunori TAKAHASHI

IPC: G01N25/18 ,  G01N30/66

Abstract: A thermal conductivity detector (TCD) includes: a detection channel through which a gas to be measured flows as a fluid; a thermal conduction part that has a filament provided at a position in the detection channel where the filament comes into direct contact with the fluid flowing through the detection channel, thereby conducting heat through the fluid flowing through the detection channel; and a detection circuit for detecting an electric signal based on a change in a voltage or a current of the filament. The thermal conduction part has a plurality of filament sections that are substantially parallel to a flow direction of the fluid flowing through the detection channel.

公开(公告)号：US20200088662A1

公开(公告)日：2020-03-19

申请号：US16130490

申请日：2018-09-13

Applicant: SHIMADZU CORPORATION

Inventor： Kazunori TAKAHASHI

IPC: G01N25/18

Abstract: To provide a TCD capable of achieving a high sensitivity and widening the dynamic range, regardless of whether the measured gas flow rate is relatively large or small.A TCD 1 includes: a gas flow switching mechanism 3 that switches between a first state where a measured gas is introduced into a first flow path 11 and a reference gas is introduced into a second flow path 13, and a second state where the reference gas is introduced into the first flow path 11 and the measured gas is introduced into the second flow path 13; a first filament unit 5 connected to the first flow path 11 and including a first filament 25; a second filament unit 7 connected to the second flow path 13 and including a second filament 27; and a detection circuit unit 9 for detecting an electric signal in accordance with a change in voltage applied to or current through the first filament 25 and the second filament 27. The first filament unit 5 and the second filament unit 7 have different detection characteristics of thermal conductivity of gas.