GAS PRESSURE CONTROLLER
    2.
    发明申请
    GAS PRESSURE CONTROLLER 审中-公开
    气压控制器

    公开(公告)号:US20150316937A1

    公开(公告)日:2015-11-05

    申请号:US14761972

    申请日:2013-01-28

    CPC classification number: G05D16/2013 F16K31/004 G05D7/0694 Y10T137/7761

    Abstract: A pressure controller is provided with an insulating substrate having a gas inlet and a gas outlet and including an inner channel, a valve mechanism including an MEMS valve element that is attached directly to a front surface or a back surface of the insulating substrate and that is connected to the inner channel via a port communicating with the inner channel, a pressure sensor section including an MEMS pressure sensor element that is attached directly to the front surface or the back surface of the insulating substrate and that is connected to the inner channel via a port communicating with the inner channel, and a control section for feedback-controlling the valve mechanism based on a detection signal of the pressure sensor section.

    Abstract translation: 压力控制器设置有具有气体入口和气体出口并包括内部通道的绝缘基板,包括直接连接到绝缘基板的前表面或后表面的MEMS阀元件的阀机构, 通过与所述内部通道连通的端口连接到所述内部通道;压力传感器部分,包括直接连接到所述绝缘基板的前表面或背面的MEMS压力传感器元件,并且经由所述内部通道连接到所述内部通道 与内部通道连通的端口,以及用于基于压力传感器部分的检测信号反馈控制阀机构的控制部分。

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