公开(公告)号：US20220205449A1

公开(公告)日：2022-06-30

申请号：US17604230

申请日：2019-04-25

Applicant: Shimadzu Corporation

Inventor： Takahiro MORI ,  Tsunehiro INOUE ,  Tomoo OTA

IPC: F04D19/04 ,  F16C32/04

Abstract: A rotation mechanism (20) of a vacuum pump (100) includes a magnetic bearing unit (21) having a first outer diameter (91), the magnetic bearing unit (21) being operable as a first radial magnetic bearing (40), and a motor unit (22) provided on a side of a second end (11b) of a rotary shaft (11) relative to the magnetic bearing unit, the motor unit (22) having a second outer diameter (92) larger than the first outer diameter, the motor unit (22) being operable as both a motor (30) and a second radial magnetic bearing (50).

公开(公告)号：US20220216767A1

公开(公告)日：2022-07-07

申请号：US17612087

申请日：2019-05-24

Applicant: SHIMADZU CORPORATION

Inventor： Takahiro MORI ,  Tsunehiro INOUE ,  Tomoo OTA ,  Masatsugu TAKEMOTO ,  Yu FU

IPC: H02K7/09 ,  F04D19/04 ,  F04D25/06 ,  F16C32/04 ,  H02K21/20

Abstract: A vacuum pump (100) includes a rotor (22b), a rotor blade (13), and a magnetic-bearing-integrated stator (22a) including a coil. The rotor includes a pair of spacer members (29), a support member (27), a permanent magnet (26), and a protective ring (28), and in an axial direction of a rotary shaft (11), the support member has a mechanical strength higher than that of the protective ring.