公开(公告)号：US20220216767A1

公开(公告)日：2022-07-07

申请号：US17612087

申请日：2019-05-24

Applicant: SHIMADZU CORPORATION

Inventor： Takahiro MORI ,  Tsunehiro INOUE ,  Tomoo OTA ,  Masatsugu TAKEMOTO ,  Yu FU

IPC: H02K7/09 ,  F04D19/04 ,  F04D25/06 ,  F16C32/04 ,  H02K21/20

Abstract: A vacuum pump (100) includes a rotor (22b), a rotor blade (13), and a magnetic-bearing-integrated stator (22a) including a coil. The rotor includes a pair of spacer members (29), a support member (27), a permanent magnet (26), and a protective ring (28), and in an axial direction of a rotary shaft (11), the support member has a mechanical strength higher than that of the protective ring.