公开(公告)号：US20150036243A1

公开(公告)日：2015-02-05

申请号：US14446450

申请日：2014-07-30

Applicant: SHOWA DENKO K.K.

Inventor： Ken INOUE ,  Kenji SHIMIZU ,  Gohei KUROKAWA ,  Haruhisa OHASHI

IPC: G11B5/851

CPC classification number: G11B5/851 ,  C23C14/08 ,  G11B5/65 ,  G11B5/66 ,  G11B5/8404

Abstract: A method for manufacturing a magnetic recording medium is provided. An orientation control layer is deposited on a non-magnetic substrate to control an orientation of a layer located directly thereon, and a perpendicular magnetic layer whose easy axis of magnetization is mainly oriented perpendicular to the non-magnetic substrate is deposited thereon. In depositing the orientation control layer, a first granular structure layer containing Ru or a material mainly made of Ru and a first oxide having a melting point of 1000 degrees C. or lower are deposited by sputtering. In depositing the perpendicular magnetic layer, a second granular structure layer containing magnetic particles and a second oxide having a melting point of 1000 degrees C. or lower are deposited by sputtering, and the magnetic particles are grown so as to form a columnar crystal continuing in a thickness direction. The columnar crystal includes crystal grains constituting the orientation control layer.

Abstract translation: 提供一种制造磁记录介质的方法。 将取向控制层沉积在非磁性基板上以控制其上直接位于其上的层的取向，并且将其易磁化轴主要定向垂直于非磁性基板的垂直磁性层沉积在其上。 在沉积取向控制层时，通过溅射沉积包含Ru或主要由Ru制成的材料的第一颗粒结构层和熔点为1000℃或更低的第一氧化物。 在沉积垂直磁性层时，通过溅射沉积包含磁性颗粒和熔点为1000摄氏度或更低的第二氧化物的第二颗粒结构层，并且使磁性颗粒生长以形成继续存在的柱状晶体 厚度方向。 柱状晶体包括构成取向控制层的晶粒。