公开(公告)号：US12195641B2

公开(公告)日：2025-01-14

申请号：US17612871

申请日：2021-02-24

Applicant: SHOWA DENKO K.K.

Inventor： So Miyaishi ,  Masahiro Okubo ,  Masayuki Yoshimura ,  Wataru Sakane ,  Teppei Tanaka ,  Saeko Nakamura ,  Saori Yamaki

IPC: C09D5/08 ,  C09D1/00 ,  C23C14/06 ,  C23C28/04

Abstract: A corrosion-resistant member including: a metal base material (10); and a corrosion-resistant coating (30) formed on the surface of the base material (10). The corrosion-resistant coating (30) is a stack of a magnesium fluoride layer (31) and an aluminum fluoride layer (32) in order from the base material (10) side. The aluminum fluoride layer (32) has a first crystalline region (32A) and a second crystalline region (32B) containing crystalline aluminum fluoride. The first crystalline region (32A) is a region in which diffraction spot arrays having regularity are observed in an electron beam diffraction image obtained by irradiation with electron beams having a beam diameter of 10 nm to 20 nm. The second crystalline region (32B) is a region in which a plurality of diffraction spots is observed but diffraction spot arrays having regularity are not observed in an electron beam diffraction image obtained by irradiation with the above-described electron beams.

公开(公告)号：US11859288B2

公开(公告)日：2024-01-02

申请号：US17611768

申请日：2020-09-03

Applicant: SHOWA DENKO K.K.

Inventor： So Miyaishi ,  Masahiro Okubo ,  Masayuki Yoshimura ,  Wataru Sakane ,  Teppei Tanaka ,  Saeko Nakamura ,  Saori Yamaki

IPC: C23C28/00 ,  H01J37/32

CPC classification number: C23C28/345 ,  C23C28/32 ,  H01J37/32477

Abstract: A corrosion-resistant member including: a metal base material (10); a corrosion-resistant coating (30) formed on the surface of the base material (10); and a buffer layer (20) formed between the base material (10) and the corrosion-resistant coating (30). The base material (10) contains a main element having the highest mass content ratio among elements contained in the base material (10) and a trace element having a mass content ratio of 1% by mass or less. The corrosion-resistant coating (30) contains at least one kind selected from magnesium fluoride, aluminum fluoride, and aluminum oxide. The buffer layer (20) contains an element of the same kind as the trace element, and the content ratio obtained by energy dispersive X-ray analysis of the element of the same kind as the trace element contained in the buffer layer (20) is 2% by mass or more and 99% by mass or less.