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公开(公告)号：US20240262680A1
公开(公告)日：2024-08-08
申请号：US18562689
申请日：2022-05-20
IPC分类号： B81B7/00
CPC分类号： B81B7/008 , B81B2201/033 , B81B2203/0136 , B81B2203/0172 , B81B2203/056
摘要： The invention relates to a method for controlling a microelectromechanical system by means of an electrical control signal alternating between a maximum voltage value (Vmax) and a minimum voltage value (Vmin), wherein, during the transition from the maximum voltage value (Vmax) to the minimum voltage value (Vmin), the value of the voltage of the electrical control signal monotonously decreases from the maximum voltage value (Vmax) to the minimum voltage value (Vmin), which signal comprising, in sequential order:
a first slope between the maximum voltage value (Vmax) and a first voltage threshold value (Vend),
a second slope, having a lower absolute value than the first slope, between the first voltage threshold value (Vend) and a second voltage threshold value (Vstart), and
a third slope, having a higher absolute value than the second slope, between the second voltage threshold value (Vstart) and the minimum voltage value (Vmin).-
公开(公告)号：US20240250620A1
公开(公告)日：2024-07-25
申请号：US18562581
申请日：2022-05-20
发明人： Thierry CÔTE , Patrice MINOTTI , Gilles BOURBON , Patrice LE MOAL
CPC分类号： H02N1/008 , B81B3/0054 , B81B2201/033 , B81B2203/0136 , B81B2203/019 , B81B2203/0384
摘要： The invention relates to a microelectromechanical system comprising a support and an actuator, the actuator comprising a drive module comprising:
a fixed drive portion (210), mounted fixedly on the support, and comprising a fixed comb (211 with fingers (213), and
a movable drive portion (220), mounted movably relative to the support, and comprising a movable comb (221) with fingers (223),
a latching mechanism that is movable between an initial unlatched configuration and a final latched configuration,
wherein the movable comb (221) is arranged facing the fixed comb (211) so that when the latching mechanism is in the initial unlatched configuration, the fingers (223) of the movable comb (221) are not engaged between the fingers (213) of the fixed comb (211), and when the latching mechanism is in the final latched configuration, the fingers (223) of the movable comb (221) are engaged between the fingers (213) of the fixed comb (211) and the latching mechanism (500) prevent disengagement of the fingers (223) of the movable comb (221) from between the fingers (213) of the fixed comb (211).-
公开(公告)号：US20240243672A1
公开(公告)日：2024-07-18
申请号：US18562630
申请日：2022-05-20
发明人： Thierry CÔTE , Patrice MINOTTI , Gilles BOURBON , Patrice LE MOAL
CPC分类号： H02N1/008 , B81B3/0051 , B81B2201/033 , B81B2201/035 , B81B2203/0136 , B81B2203/019 , B81B2203/0384
摘要： The invention relates to a microelectromechanical system (10) comprising a drive module (200) comprising:
a fixed drive portion (210),
a movable drive portion (220), and
a suspension (230),
the movable drive portion (220) being able to be moved relative to the fixed drive portion (210) in a first direction (A), as a result of an electrostatic force, which causes an elastic deformation of the suspension (230), and the movable drive portion (220) being able to be moved relative to the fixed drive portion (210) in a second direction (B), opposite to the first direction (A), as a result of an elastic return force generated by the suspension (230),
the actuator (11) also comprising a stop (24) limiting the movement of the first movable portion (220) in the second direction (B) so that the elastic force generated by the suspension (230) is not cancelled.
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