公开(公告)号：US20160276188A1

公开(公告)日：2016-09-22

申请号：US15072823

申请日：2016-03-17

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Toshimitsu MORIHANA ,  Yuki MATSUMOTO ,  Mitsuo NATSUME

IPC: H01L21/673 ,  H01L21/677

CPC classification number: H01L21/67393

Abstract: There is provided an end structure of a nozzle 11 including a gas-flow passage 13 communicable with an opening 104 provided through a bottom of a container 100 configured to contain an object, the nozzle 11 configured so that gas is injected into or discharged from the container 100 through the gas-flow passage 13 and the opening 104. The end structure includes a contact portion 19 provided at an upper end portion of the nozzle 11 and around the gas-flow passage 13, and the contact portion 19 is configured to be brought into contact with a contacted portion 103 provided around the opening 104. The contact portion 19 includes a flat portion 19b and protruding portions 19a and 19c each protruding upward relative to the flat portion 19b, and the flat portion 19b is made of material softer than that of the protruding portions 19a and 19c.

Abstract translation: 提供了喷嘴11的端部结构，其包括气体流路13，气体通道13可与通过构造成容纳物体的容器100的底部设置的开口104连通，喷嘴11被构造成使得气体被喷射到 容器100通过气体流路13和开口104.端部结构包括设置在喷嘴11的上端部并且在气体流路13周围的接触部19，接触部19构成为 与设置在开口104周围的被接触部分103接触。接触部分19包括平坦部分19b和相对于平坦部分19b向上突出的突出部分19a和19c，并且平坦部分19b由比较 突出部分19a和19c。