公开(公告)号：US20190093226A1

公开(公告)日：2019-03-28

申请号：US16092124

申请日：2017-04-07

Applicant: SIO2 MEDICAL PRODUCTS, INC.

Inventor： James Newton ,  Brian Russell Lilly ,  Becky L. Clark

IPC: C23C16/507 ,  C23C16/40 ,  C23C16/455 ,  A61M5/31

Abstract: A two-phase method is provided for applying a lubricity layer to a surface. The two-phase method comprises a low power deposition step and a high power crosslinking step. The method includes providing a surface of a vessel or an object to be processed. A gas inlet having an internal passage having at least one outlet is provided. An outer electrode is provided. A gaseous PECVD precursor is introduced via at least one outlet of the internal passage. Electromagnetic energy is applied to the outer electrode under conditions effective to form a PECVD lubricity layer on at least a portion of the inner surface. Relative axial motion between the vessel or the object and the gas inlet is provided during at least some time when electromagnetic energy is applied to the outer electrode.