公开(公告)号：US10132768B2

公开(公告)日：2018-11-20

申请号：US14895702

申请日：2014-08-29

申请人： SK INNOVATION CO., LTD. ,  UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)

发明人： Heung-Joo Shin ,  Yeong Jin Lim ,  Jeong Il Heo

IPC分类号： G01N27/12 ,  G01N33/00

摘要： Provided is a method for manufacturing a gas sensor according to an exemplary embodiment of the present invention including: a) forming a pair of photoresist electrodes spaced apart from each other and a photoresist wire connecting upper portions of the pair of photoresist electrodes to each other by exposing and developing a first photoresist coated on a substrate; b) forming a pair of carbon electrodes and a carbon wire that are connected to be integrated with each other, by pyrolyzing the pair of photoresist electrodes and the photoresist wire; and c) forming metal oxide nanowires on a surface of the carbon wire.