Gas sensor and method for manufacturing same

    公开(公告)号:US10132768B2

    公开(公告)日:2018-11-20

    申请号:US14895702

    申请日:2014-08-29

    IPC分类号: G01N27/12 G01N33/00

    摘要: Provided is a method for manufacturing a gas sensor according to an exemplary embodiment of the present invention including: a) forming a pair of photoresist electrodes spaced apart from each other and a photoresist wire connecting upper portions of the pair of photoresist electrodes to each other by exposing and developing a first photoresist coated on a substrate; b) forming a pair of carbon electrodes and a carbon wire that are connected to be integrated with each other, by pyrolyzing the pair of photoresist electrodes and the photoresist wire; and c) forming metal oxide nanowires on a surface of the carbon wire.