Method and apparatus for detecting concave cylinder and cylindrical diverging lens

    公开(公告)号:US10663289B2

    公开(公告)日:2020-05-26

    申请号:US16326242

    申请日:2017-05-09

    摘要: A method and an apparatus for detecting a concave cylinder and a cylindrical diverging lens are disclosed. In particular, a method for non-contact interference detection of a cylindrical shape is disclosed. A cylindrical converging lens and a cylindrical diverging lens are combined with a to-be-tested concave cylinder respectively. Wavefront error data of the combination of the cylindrical diverging lens and the to-be-tested concave cylinder and wavefront error data of the combination of the cylindrical converging lens and the to-be-tested concave cylinder are obtained through interference measurement respectively. Wavefront error data of a combination of the cylindrical diverging lens and the cylindrical converging lens is then obtained through interference measurement. Shape error data of the to-be-tested concave cylinder, the cylindrical diverging lens, and the cylindrical converging lens is obtained respectively by using a difference algorithm and a wavefront recovery algorithm.