公开(公告)号：US20170098670A1

公开(公告)日：2017-04-06

申请号：US15311221

申请日：2014-12-23

Applicant: SOUTH CHINA NORMAL UNIVERSITY

Inventor： KUNYUAN XU

IPC: H01L27/13 ,  H03L7/26 ,  H01L29/205 ,  H01L23/31 ,  H01L29/20

CPC classification number: H01L27/13 ,  B82Y20/00 ,  H01L23/3171 ,  H01L28/20 ,  H01L28/40 ,  H01L29/2003 ,  H01L29/205 ,  H01L29/772 ,  H01L29/861 ,  H01Q21/06 ,  H01Q21/064 ,  H03L7/26

Abstract: Provided is a planar nano-oscillator array having phase locking function, including two or more planar nano-oscillators which are arranged in parallel. The two oscillators are connected by planar resistors and capacitors, and a structure thereof includes: electrodes; respectively introducing two pairs of laterally arranged parallel insulation notch grooves into two-dimensional electron gas layers, so as to form oscillation channels; vertically disposing separating insulation notch grooves, so that a planar resistor A with low resistance which is connected to the electrode is formed on the left side, and a planar resistor B with low resistance which is connected to the electrode is formed on the right side; and arranging, between the two oscillators, an insulation capacitor notch groove which is parallel to the oscillation channels, insulating materials having a high dielectric constant being filled therein.