公开(公告)号：US20190056663A1

公开(公告)日：2019-02-21

申请号：US15754690

申请日：2015-07-06

Applicant: SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA

Inventor： XING CHENG ,  Ziping LI ,  Zengju FAN ,  Yangqing TIAN ,  Bingqing LUO ,  Yulong CHEN ,  Shuimiao JING ,  Bo YU

IPC: G03F7/039 ,  G03F7/00 ,  C08L67/00 ,  C08K5/00

Abstract: An expansion polymerization imprinting glue for nano-imprinting. Raw materials required for the preparation of the expansion polymerization imprinting glue comprise a low polymer and an expansion monomer. Compared with the prior art, after the expansion monomer is introduced into the expansion polymerization imprinting glue for nano-imprinting, the expansion monomer can be polymerized with the low polymer, the volume change of the imprinting glue after polymerization can be adjusted, and accordingly the volume shrinkage after the imprinting glue is cured is reduced or even eliminated; and the imprinting glue having zero curing shrinkage or volume expansion can be obtained by adjusting the content of the expansion monomer. The imprinting glue can effectively reduce the residual stress in a micro-nano pattern, and the generation of pattern defects in the nano-imprinting demolding process caused by the residual stress is reduced while accurate pattern copying is implemented.