公开(公告)号：US20240328872A1

公开(公告)日：2024-10-03

申请号：US18649980

申请日：2024-04-29

Applicant: SOUTHEAST UNIVERSITY

Inventor： Aiguo SONG ,  Yuhan CHEN ,  Jingjing XU ,  Baoguo XU ,  Huijun LI

IPC: G01L1/22 ,  G01L1/20

CPC classification number: G01L1/2206 ,  G01L1/205

Abstract: A combined six-dimensional force sensor based on thin-film sputtering technology includes a force transmission table, a cross beam, a base, a top cover, a bottom cover and strain gauges. Strain gauges are sputtered on the elastomer structure to form six sets of Wheatstone bridges. The measurement method of the six-dimensional force sensor is that: an input force/moment of a certain dimension acts on the elastomer structure including the force transmission table and the cross beam through the top cover, the cross beam is deformed and resistance values of strain gauges at corresponding positions change, and output voltages of corresponding bridges change.

公开(公告)号：US20240328876A1

公开(公告)日：2024-10-03

申请号：US18648462

申请日：2024-04-28

Applicant: SOUTHEAST UNIVERSITY

Inventor： Aiguo SONG ,  Jingjing XU ,  Yuhan CHEN ,  Baoguo XU ,  Huijun LI

IPC: G01L1/22

CPC classification number: G01L1/2287

Abstract: A six-dimensional force sensor elastomer structure based on improved cross beam includes main beams, first floating beams, second floating beams, square corners and thin film strain gauges. Strain gauges are sputtered on the main beams and the first floating beams to form a plurality of sets of Wheatstone bridges. When an input force/moment of a certain dimension acts on the center of an elastomer, the sensor is deformed and resistance values of strain gauges at corresponding positions change, so that output voltages of corresponding bridges are changed.

公开(公告)号：US20240328873A1

公开(公告)日：2024-10-03

申请号：US18655303

申请日：2024-05-05

Applicant: SOUTHEAST UNIVERSITY

Inventor： Aiguo SONG ,  Jingjing XU ,  Yuhan CHEN ,  Baoguo XU ,  Huijun LI

IPC: G01L1/22

CPC classification number: G01L1/2206 ,  G01L1/2262 ,  G01L1/2287

Abstract: A combined structure for thin film sputtering high-precision six-dimensional force sensor includes a cross beam, a double U-shaped beam, a base, a top cover, a bottom cover and thin film strain gauges. Strain gauges are sputtered on the main beam to form six sets of Wheatstone bridges, with three sets on the cross beam and three sets on the double U-shaped beam. The measurement method of the six-dimensional force sensor is that: an input force/moment of a certain dimension acts on the center of the cross beam and the center of the double U-shaped beam, so that the sensor is deformed and resistance values of strain gauges at corresponding positions change, thereby changing output voltages of corresponding bridges.