公开(公告)号：US20100071467A1

公开(公告)日：2010-03-25

申请号：US12236757

申请日：2008-09-24

申请人： STEVE NASIRI ,  JOSEPH SEEGER ,  BRUNO BOROVIC ,  GOKSEN YARALIOGLU

发明人： STEVE NASIRI ,  JOSEPH SEEGER ,  BRUNO BOROVIC ,  GOKSEN YARALIOGLU

IPC分类号： G01C19/56

CPC分类号： G01C19/5719

摘要： A system and method describes an inertial sensor assembly, the assembly comprises a substrate parallel to the plane, at least one in-plane angular velocity sensor comprising a pair proof masses that are oscillated in anti-phase fashion along an axis normal to the plane. The first in-plane angular velocity sensor further includes a sensing frame responsive to the angular velocity of the substrate around the first axis parallel to the plane and perpendicular to the axis normal to the plane. The assembly also includes at least one out-of-plane angular velocity sensor comprising a pair of proof masses that are oscillated in anti-phase fashion in the plane parallel to the plane. The out-of-plane angular velocity sensor further comprises a sensing frame responsive to the angular velocity of the substrate around the axis normal to the plane.

摘要翻译： 一种系统和方法描述了惯性传感器组件，该组件包括平行于该平面的基底，至少一个平面内角速度传感器包括沿垂直于该平面的轴以反相方式摆动的一对检验质量块。 第一平面角速度传感器还包括响应于平行于平面并且垂直于垂直于平面的轴线的第一轴线周围的基板的角速度的感测框架。 组件还包括至少一个平面外的角速度传感器，其包括在平行于平面的平面中以反相方式振荡的一对校验质量块。 平面外角速度传感器还包括响应于垂直于平面的轴线的基板的角速度的感测框架。