公开(公告)号：US12251736B2

公开(公告)日：2025-03-18

申请号：US17527214

申请日：2021-11-16

Applicant: STI Co., Ltd.

Inventor： Young Soo Park ,  Dong Geun Hur ,  Ki Man Lee

IPC: B08B3/02 ,  F26B3/04 ,  F26B3/30 ,  G03F7/00

Abstract: Proposed is a POD cleaning process including: separating an introduced POD into an inner POD and an outer POD; cleaning a separation POD, which results from the separation, within a cleaning sub-chamber; drying the separation POD, which undergoes the cleaning, within a drying chamber; vacuum-processing the separation POD undergoing the drying; and assembling the inner POD and the outer POD that undergo the vacuum processing, in which the cleaning and the drying are separately performed.

公开(公告)号：US11097320B2

公开(公告)日：2021-08-24

申请号：US16270953

申请日：2019-02-08

Applicant: STI CO., LTD.

Inventor： Young Soo Park ,  Oh Hyeong Kweon ,  Dong Keun Jung ,  Dong Geun Hur

IPC: B08B9/08 ,  B08B9/20 ,  H01L21/673 ,  H01L21/67 ,  H01L21/677 ,  B08B3/10 ,  B08B5/04

Abstract: An embodiment of the present subject matter including a FOUP body and a FOUP cover includes: a loading and unloading part configured to load or unload the FOUP; a standby part which is provided at one side of the loading and unloading part and on which the FOUP body and the FOUP cover are separated from or coupled to each other; a cleaning chamber configured to clean the FOUP body and the FOUP cover using steam; and a robot configured to transport the FOUP body and the FOUP cover between the standby part and the cleaning chamber.

公开(公告)号：US12246361B2

公开(公告)日：2025-03-11

申请号：US17527211

申请日：2021-11-16

Applicant: STI Co., Ltd.

Inventor： Young Soo Park ,  Dong Geun Hur ,  Ki Man Lee

IPC: B08B3/02 ,  B08B13/00 ,  F26B3/04 ,  F26B3/30 ,  G03F7/00

Abstract: Proposed is a POD cleaning chamber including: a cleaning sub-chamber including an entrance door and accommodating and cleaning a separation POD being transported, the separation POD resulting from separating a POD; a drying chamber including an exit door and drying the separations POD transferred from the cleaning sub-chamber; a shutter being arranged between the cleaning sub-chamber and the drying chamber, the shutter being configured to ascend and descend; and a chamber moving mechanism transporting the separation POD from the cleaning sub-chamber to the drying chamber.