公开(公告)号：US11097320B2

公开(公告)日：2021-08-24

申请号：US16270953

申请日：2019-02-08

申请人： STI CO., LTD.

发明人： Young Soo Park ,  Oh Hyeong Kweon ,  Dong Keun Jung ,  Dong Geun Hur

IPC分类号： B08B9/08 ,  B08B9/20 ,  H01L21/673 ,  H01L21/67 ,  H01L21/677 ,  B08B3/10 ,  B08B5/04

摘要： An embodiment of the present subject matter including a FOUP body and a FOUP cover includes: a loading and unloading part configured to load or unload the FOUP; a standby part which is provided at one side of the loading and unloading part and on which the FOUP body and the FOUP cover are separated from or coupled to each other; a cleaning chamber configured to clean the FOUP body and the FOUP cover using steam; and a robot configured to transport the FOUP body and the FOUP cover between the standby part and the cleaning chamber.