公开(公告)号：US20190247900A1

公开(公告)日：2019-08-15

申请号：US16270953

申请日：2019-02-08

Applicant: STI CO., LTD.

Inventor： Young Soo PARK ,  Oh Hyeong KWEON ,  Dong Keun JUNG ,  Dong Geun HUR

IPC: B08B9/08 ,  B08B9/20 ,  B08B3/10 ,  B08B5/04 ,  H01L21/673

CPC classification number: B08B9/0861 ,  B08B3/10 ,  B08B5/04 ,  B08B9/0826 ,  B08B9/205 ,  B08B2203/007 ,  B08B2209/08 ,  B08B2230/01 ,  H01L21/67389

Abstract: The present invention is directed to providing a front opening unified pod (FOUP) cleaning device capable of improving cleaning and drying efficiency for a FOUP body and a FOUP cover and a FOUP cleaning method. To this end, the FOUP cleaning device for cleaning a FOUP including a FOUP body and a FOUP cover includes: a loading and unloading part configured to load or unload the FOUP; a standby part which is provided at one side of the loading and unloading part and on which the FOUP body and the FOUP cover are separated from or coupled to each other; a cleaning chamber configured to clean the FOUP body and the FOUP cover using steam; and a robot configured to transport the FOUP body and the FOUP cover between the standby part and the cleaning chamber. The FOUP cleaning method for cleaning a FOUP including a FOUP body and a FOUP cover includes loading the FOUP on a loading and unloading part; transporting the loaded FOUP to a standby part; transporting the FOUP body and the FOUP cover transported to the standby part to a cleaning chamber using a robot; and cleaning the FOUP body and the FOUP cover by supplying steam into the cleaning chamber.