INSULATION WALL BETWEEN TRANSISTORS ON SOI
    1.
    发明申请
    INSULATION WALL BETWEEN TRANSISTORS ON SOI 审中-公开
    SOI上的晶体管之间的绝缘壁

    公开(公告)号:US20150137242A1

    公开(公告)日:2015-05-21

    申请号:US14605064

    申请日:2015-01-26

    CPC classification number: H01L29/0653 H01L21/76283 H01L27/1203

    Abstract: An insulation wall separating transistors formed in a thin semiconductor layer resting on an insulating layer laid on a semiconductor substrate, this wall being formed of an insulating material and comprising a wall crossing the thin layer and the insulating layer and penetrating into the substrate, and lateral extensions extending in the substrate under the insulating layer.

    Abstract translation: 一个绝缘壁,分离形成在半导体层上的薄的半导体层中的晶体管,该绝缘层位于半导体衬底上的绝缘层上,该壁由绝缘材料形成,并且包括与薄层交叉的壁和绝缘层并穿透到衬底中 在绝缘层下方的衬底中延伸的延伸部。

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