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公开(公告)号：US20170297910A1
公开(公告)日：2017-10-19
申请号：US15639203
申请日：2017-06-30
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Alfio RUSSO , Massimo Cataldo MAZZILLO , Ferenc NAGY
Abstract: A MEMS sensor has at least a movable element designed to oscillate at an oscillation frequency, and an integrated measuring system coupled to the movable element to provide a measure of the oscillation frequency. The measuring system has a light source to emit a light beam towards the movable element and a light detector to receive the light beam reflected back from the movable element, including a semiconductor photodiode array. In particular, the light detector is an integrated photomultiplier having an array of single photon avalanche diodes.
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