OSCILLATION FREQUENCY MEASURING SYSTEM AND METHOD FOR A MEMS SENSOR

    公开(公告)号:US20170297910A1

    公开(公告)日:2017-10-19

    申请号:US15639203

    申请日:2017-06-30

    Abstract: A MEMS sensor has at least a movable element designed to oscillate at an oscillation frequency, and an integrated measuring system coupled to the movable element to provide a measure of the oscillation frequency. The measuring system has a light source to emit a light beam towards the movable element and a light detector to receive the light beam reflected back from the movable element, including a semiconductor photodiode array. In particular, the light detector is an integrated photomultiplier having an array of single photon avalanche diodes.

    ELECTRONIC DEVICE WITH SHORT CIRCUIT PROTECTION ELEMENT, FABRICATION METHOD AND DESIGN METHOD

    公开(公告)号:US20210013147A1

    公开(公告)日:2021-01-14

    申请号:US17036312

    申请日:2020-09-29

    Abstract: An electronic device includes: a control terminal, which extends on a first face of a substrate; a first conduction terminal, which extends in the substrate at the first face of the substrate; a first insulating layer interposed between the control terminal and the first conduction terminal; a conductive path, which can be biased at a biasing voltage; and a protection element, coupled to the control terminal and to the conductive path, which forms an electrical connection between the control terminal and the conductive path and is designed to melt, and thus interrupt electrical connection, in the presence of a leakage current higher than a critical threshold between the control terminal and the first conduction terminal through the first insulating layer.

    ELECTRONIC DEVICE WITH SHORT CIRCUIT PROTECTION ELEMENT, FABRICATION METHOD AND DESIGN METHOD

    公开(公告)号:US20190326217A1

    公开(公告)日:2019-10-24

    申请号:US16389866

    申请日:2019-04-19

    Abstract: An electronic device includes: a control terminal, which extends on a first face of a substrate; a first conduction terminal, which extends in the substrate at the first face of the substrate; a first insulating layer interposed between the control terminal and the first conduction terminal; a conductive path, which can be biased at a biasing voltage; and a protection element, coupled to the control terminal and to the conductive path, which forms an electrical connection between the control terminal and the conductive path and is designed to melt, and thus interrupt electrical connection, in the presence of a leakage current higher than a critical threshold between the control terminal and the first conduction terminal through the first insulating layer.

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