PROCESS FOR MANUFACTURING A NOZZLE PLATE AND FLUID-EJECTION DEVICE PROVIDED WITH THE NOZZLE PLATE
    6.
    发明申请
    PROCESS FOR MANUFACTURING A NOZZLE PLATE AND FLUID-EJECTION DEVICE PROVIDED WITH THE NOZZLE PLATE 审中-公开
    用喷嘴板制造喷嘴板和流体喷射装置的方法

    公开(公告)号:US20150040397A1

    公开(公告)日:2015-02-12

    申请号:US14523625

    申请日:2014-10-24

    Abstract: A nozzle plate for a fluid-ejection device, comprising: a first substrate made of semiconductor material, having a first side and a second side; a structural layer extending on the first side of the first substrate, the structural layer having a first side and a second side, the second side of the structural layer facing the first side of the first substrate; at least one first through hole, having an inner surface, extending through the structural layer, the first through hole having an inlet section corresponding to the first side of the structural layer and an outlet section corresponding to the second side of the structural layer; a narrowing element adjacent to the surface of the first through hole, and including a tapered portion such that the inlet section of the first through hole has an area larger than a respective area of the outlet section of the first through hole.

    Abstract translation: 一种用于流体喷射装置的喷嘴板,包括:具有第一侧和第二侧的由半导体材料制成的第一基板; 所述结构层在所述第一基板的所述第一侧上延伸,所述结构层具有第一侧面和第二侧面,所述结构层的第二面朝向所述第一基板的第一侧; 至少一个第一通孔,具有延伸穿过所述结构层的内表面,所述第一通孔具有对应于所述结构层的第一侧的入口部分和与所述结构层的第二侧相对应的出口部分; 与第一通孔的表面相邻的变窄元件,并且包括锥形部分,使得第一通孔的入口部分具有比第一通孔的出口部分的相应面积大的面积。

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