公开(公告)号：US11898989B2

公开(公告)日：2024-02-13

申请号：US17824586

申请日：2022-05-25

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Francesco Foncellino ,  Luigi Barretta

IPC: G01N29/00 ,  G01N29/02 ,  G01N29/036 ,  G01N29/22

CPC classification number: G01N29/022 ,  G01N29/036 ,  G01N29/222 ,  G01N2291/02408

Abstract: A MEMS device for detecting particulate and gases in the air, comprising: a first semiconductor body; a second semiconductor body with a first surface facing a first surface of the first semiconductor body; and a first spacer element and a second spacer element, which extend between the first surfaces of the semiconductor bodies so as to arrange them at a distance apart from one another and define a first duct. The MEMS device further comprises at least one of the following: a first particulate sensor comprising a first emitter unit for generating acoustic waves in the first duct, and a first particulate-detection unit for detecting the particulate, the first emitter unit and the first particulate-detection unit facing one another through the first duct; and a first gas sensor, which faces the first duct and is configured to detect said gases in the air present in the first duct.