公开(公告)号：US20020008296A1

公开(公告)日：2002-01-24

申请号：US09792962

申请日：2001-02-26

Applicant: STMicroelectronics, Inc.

Inventor： Tsiu Chiu Chan ,  Melvin Joseph DeSilva

IPC: H01L021/00 ,  H01L029/84

CPC classification number: G01P15/18 ,  B81B2201/014 ,  B81C1/00246 ,  B81C2203/0735 ,  G01P15/0802 ,  G01P15/135

Abstract: An integrated circuit and method are provided for sensing activity such as acceleration in a predetermined direction of movement. The integrated released beam sensor preferably includes a switch detecting circuit region and a sensor switching region connected to and positioned adjacent the switch detecting circuit region. The sensor switching region preferably includes a plurality of floating contacts positioned adjacent and lengthwise extending outwardly from said switch detecting circuit region for defining a plurality of released beams so that each of said plurality of released beams displaces in a predetermined direction responsive to acceleration. The plurality of released beams preferably includes at least two released beams lengthwise extending outwardly from the switch detecting circuit region to different predetermined lengths and at least two released beams lengthwise extending outwardly from the switch detecting circuit region to substantially the same predetermined lengths. The methods of forming an integrated sensor advantageously are preferably compatible with know integrated circuit manufacturing processes, such as for CMOS circuit manufacturing, with only slight variations therefrom.

Abstract translation: 提供集成电路和方法用于感测诸如预定运动方向的加速度的活动。 集成释放的光束传感器优选地包括开关检测电路区域和连接到并且位于开关检测电路区域附近的传感器开关区域。 传感器切换区域优选地包括多个浮动触点，其位于邻近并纵向地从所述开关检测电路区域向外延伸，用于限定多个释放的波束，使得所述多个释放波束中的每一个响应加速度以预定方向移动。 多个释放的光束优选地包括至少两个从开关检测电路区域向外延伸到不同预定长度的释放光束，以及至少两个从开关检测电路区域向外延伸到大致相同的预定长度的释放光束。 有利地形成集成传感器的方法优选地与知道的集成电路制造工艺相兼容，例如用于CMOS电路制造，仅具有轻微的变化。