公开(公告)号：US20250102371A1

公开(公告)日：2025-03-27

申请号：US18895219

申请日：2024-09-24

Applicant: STMicroelectronics International N.V.

Inventor： Luca GUERINONI ,  Gianfranco Javier YALLICO SANCHEZ ,  Davide BERNABUCCI ,  Carlo VALZASINA ,  Claudia COMI ,  David FARACI

IPC: G01K7/34

Abstract: A MEMS metamaterial has a substrate and a suspended structure having an elementary cell which extends at a distance from the substrate along a first direction. The elementary cell has a first structural region having a first material with a first coefficient of thermal expansion. The first structural region has a first side facing the substrate and a second side opposite to the first side. The elementary cell also has a second structural region having a second material different from the first material and with a second coefficient of thermal expansion different from the first coefficient of thermal expansion. The second structural region extends on at least part of the first structural region, on the first side, the second side, or both the first and second side of the first structural region.