公开(公告)号：US20250042718A1

公开(公告)日：2025-02-06

申请号：US18784719

申请日：2024-07-25

Applicant: STMicroelectronics International N.V.

Inventor： Manuel RIANI ,  Carlo VALZASINA ,  Gianfranco Javier YALLICO SANCHEZ ,  Luca GUERINONI

IPC: B81B3/00 ,  G01P15/125

Abstract: A MEMS (MicroElectroMechanical System) device includes: a supporting body; a movable mass, constrained to the supporting body by flexures so as to be able to oscillate in a main direction; an actuator device, configured to apply to the movable mass an electrostatic actuation force, transverse to the main direction; and a control circuit configured to detect stiction conditions, in which the movable mass is stuck to the supporting body by a stiction force, and for driving the actuator device in response to recognition of the stiction conditions. The actuation force is a variable force with an actuation frequency band containing at least one resonance frequency in a direction transverse to the main direction of a mechanical system comprising the movable mass stuck to the supporting body.