MOS technology power device with low output resistance and low capacity, and related manufacturing process
    1.
    发明申请
    MOS technology power device with low output resistance and low capacity, and related manufacturing process 审中-公开
    MOS技术功率器件具有低输出电阻和低容量,以及相关的制造工艺

    公开(公告)号:US20020123195A1

    公开(公告)日:2002-09-05

    申请号:US10006778

    申请日:2001-11-05

    CPC classification number: H01L29/7802 H01L29/0847 H01L29/66712

    Abstract: A MOS-gated power device includes a plurality of elementary functional units, each elementary functional unit including a body region of a first conductivity type formed in a semiconductor material layer of a second conductivity type having a first resistivity value. Under each body region a respective lightly doped region of the second conductivity type is provided having a second resistivity value higher than the first resistivity value.

    Abstract translation: MOS门控功率器件包括多个基本功能单元,每个基本功能单元包括形成在具有第一电阻率值的第二导电类型的半导体材料层中的第一导电类型的体区。 在每个体区下方提供具有高于第一电阻率值的第二电阻率值的第二导电类型的相应轻掺杂区。

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