公开(公告)号：US20140314254A1

公开(公告)日：2014-10-23

申请号：US14254511

申请日：2014-04-16

Applicant: STMicroelectronics S.r.I.

Inventor： Sebastiano Conti ,  Marco Salina ,  Luca Lamagna ,  Matteo Perletti

IPC: H04R23/00 ,  H04R31/00

CPC classification number: H04R23/00 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  Y10T29/49005

Abstract: A micromechanical structure for a MEMS capacitive acoustic transducer, has: a substrate made of semiconductor material, having a front surface lying in a horizontal plane; a membrane, coupled to the substrate and designed to undergo deformation in the presence of incident acoustic-pressure waves; a fixed electrode, which is rigid with respect to the acoustic-pressure waves and is coupled to the substrate by means of an anchorage structure, in a suspended position facing the membrane to form a detection capacitor. The anchorage structure has at least one pillar element, which is at least in part distinct from the fixed electrode and supports the fixed electrode in a position parallel to the horizontal plane.

Abstract translation: 一种用于MEMS电容式声换能器的微机械结构，具有：由半导体材料制成的基板，其前表面位于水平面; 膜，其耦合到基底并设计成在存在入射声压波的情况下经历变形; 固定电极，其相对于声压波是刚性的，并且通过锚定结构耦合到衬底，处于面向膜的悬挂位置以形成检测电容器。 锚固结构具有至少一个柱元件，其至少部分地不同于固定电极，并且将固定电极支撑在平行于水平面的位置。