公开(公告)号：US20150001651A1

公开(公告)日：2015-01-01

申请号：US14316504

申请日：2014-06-26

Applicant: STMicroelectronics S.r.I.

Inventor： Dino Faralli ,  Paolo Ferrari ,  Laura Maria Castoldi

IPC: B81B3/00 ,  B81C1/00 ,  B81C3/00

CPC classification number: B81B3/0021 ,  B81B7/0016 ,  B81B7/0058 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2207/115 ,  B81C1/00158 ,  B81C3/00 ,  B81C2203/0118 ,  H01L2224/48091 ,  H01L2224/48145 ,  H01L2924/00014 ,  H01L2924/00012

Abstract: A MEMS device wherein a die of semiconductor material has a first face and a second face. A diaphragm is formed in or on the die and faces the first surface. A cap is fixed to the first face of the die and has a hole forming a fluidic path connecting the diaphragm with the outside world. A closing region, for example a support, a second cap, or another die, is fixed to the second face of the die. The closing region forms, together with the die and the cap, a stop structure configured to limit movements of the suspended region in a direction perpendicular to the first face.

Abstract translation: 一种MEMS器件，其中半导体材料的管芯具有第一面和第二面。 在模具中或模具上形成隔膜，并且面对第一表面。 帽固定在模具的第一面上，并且具有形成连接隔膜与外界的流体路径的孔。 关闭区域，例如支撑件，第二盖子或另一个模具，被固定到模具的第二面。 闭合区域与模具和盖一起形成止挡结构，其被构造成限制悬挂区域在垂直于第一面的方向上的移动。

公开(公告)号：US09233834B2

公开(公告)日：2016-01-12

申请号：US14316504

申请日：2014-06-26

Applicant: STMicroelectronics S.r.I.

Inventor： Dino Faralli ,  Paolo Ferrari ,  Laura Maria Castoldi

IPC: B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C3/00

CPC classification number: B81B3/0021 ,  B81B7/0016 ,  B81B7/0058 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2207/115 ,  B81C1/00158 ,  B81C3/00 ,  B81C2203/0118 ,  H01L2224/48091 ,  H01L2224/48145 ,  H01L2924/00014 ,  H01L2924/00012

Abstract: A MEMS device wherein a die of semiconductor material has a first face and a second face. A diaphragm is formed in or on the die and faces the first surface. A cap is fixed to the first face of the die and has a hole forming a fluidic path connecting the diaphragm with the outside world. A closing region, for example a support, a second cap, or another die, is fixed to the second face of the die. The closing region forms, together with the die and the cap, a stop structure configured to limit movements of the suspended region in a direction perpendicular to the first face.

Abstract translation: 一种MEMS器件，其中半导体材料的管芯具有第一面和第二面。 在模具中或模具上形成隔膜，并且面对第一表面。 帽固定在模具的第一面上，并且具有形成连接隔膜与外界的流体路径的孔。 关闭区域，例如支撑件，第二盖子或另一个模具，被固定到模具的第二面。 闭合区域与模具和盖一起形成止挡结构，其被构造成限制悬挂区域在垂直于第一面的方向上的移动。