公开(公告)号：US09864187B2

公开(公告)日：2018-01-09

申请号：US15162885

申请日：2016-05-24

Applicant: STMicroelectronics S.r.I.

Inventor： Roberto Carminati

IPC: G02B26/08 ,  B81B3/00 ,  G03B21/00

CPC classification number: G02B26/0833 ,  B81B3/0083 ,  B81B2201/042 ,  G02B26/101 ,  G02B26/105 ,  G03B21/008

Abstract: A reflector micromechanical structure includes a frame with a window. The frame is elastically connected to an anchorage structure by first elastic elements. An actuation structure operatively coupled to the frame is configured to generate a first actuation movement of the frame about a first actuation axis. A mobile mass is positioned within the window and elastically coupled to the frame by second elastic elements. A mass distribution is associated to the mobile mass such as to generate, by an inertial effect in response to the first actuation movement, a second actuation movement of rotation of the mobile mass about a second actuation axis.