公开(公告)号：US20020189354A1

公开(公告)日：2002-12-19

申请号：US10128133

申请日：2002-04-23

Applicant: STMicroelectronics S.r.I.

Inventor： Guido Spinola Durante ,  Sarah Zerbini ,  Simone Gardella

IPC: G01P015/08

CPC classification number: G01C19/5747

Abstract: The gyroscope is formed by a driving system including a driving mass having an open concave shape; an accelerometer including a sensing mass and comprising mobile sensing electrodes; a linkage connecting the driving mass to the sensing mass. The sensing mass is surrounded on three sides by the driving mass and has a peripheral portion not facing the sensing mass. The mobile sensing electrodes extend integral with the sensing mass from the peripheral portion not facing the driving mass and are interleaved with fixed sensing electrodes. Thereby, there are no passing electrical connections extending below the sensing mass. Moreover the linkage includes springs placed equidistant from the center of gravity of the accelerometer, and the gyroscope is anchored to the substrate with anchoring springs placed equidistant from the center of gravity of the assembly formed by the driving system and by the accelerometer.

Abstract translation: 陀螺仪由包括具有开口凹形状的驱动块的驱动系统形成; 包括感测质量并包括移动感测电极的加速度计; 将驱动质量与感测质量连接的连杆。 感测质量被驱动质量块三面围绕，并且具有不面向感测质量的周边部分。 移动感测电极与来自不面向驱动质量块的周边部分的感测质量一体地延伸并且与固定感测电极交错。 因此，在感测质量下方没有延伸的电连接。 此外，联动装置包括与加速度计的重心等距离的弹簧，并且陀螺仪通过与由驱动系统和加速度计形成的组件的重心等距离的锚定弹簧锚定到基底。