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公开(公告)号:US20210119105A1
公开(公告)日:2021-04-22
申请号:US17070548
申请日:2020-10-14
Applicant: STMicroelectronics S.r.l.
Inventor: Luca SEGHIZZI , Federico VERCESI , Claudia PEDRINI
IPC: H01L41/083 , H01L41/113 , H01L41/25 , H01L41/35
Abstract: A transducer includes a supporting body and a suspended structure mechanically coupled to the supporting body. The suspended structure has a first and a second surface opposite to one another along an axis, and is configured to oscillate in an oscillation direction having at least one component parallel to the axis. A first piezoelectric transducer is disposed on the first surface of the suspended structure, and a second piezoelectric transducer is disposed on the second surface of the suspended structure.
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公开(公告)号:US20240065106A1
公开(公告)日:2024-02-22
申请号:US18498737
申请日:2023-10-31
Applicant: STMICROELECTRONICS S.r.l.
Inventor: Luca SEGHIZZI , Federico VERCESI , Claudia PEDRINI
CPC classification number: H10N30/50 , H10N30/03 , H10N30/09 , H10N30/306
Abstract: A transducer includes a supporting body and a suspended structure mechanically coupled to the supporting body. The suspended structure has a first and a second surface opposite to one another along an axis, and is configured to oscillate in an oscillation direction having at least one component parallel to the axis. A first piezoelectric transducer is disposed on the first surface of the suspended structure, and a second piezoelectric transducer is disposed on the second surface of the suspended structure.
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