Method of manufacturing acoustic wave device with multi-layer piezoelectric substrate

    公开(公告)号:US12009795B2

    公开(公告)日:2024-06-11

    申请号:US17119904

    申请日:2020-12-11

    CPC classification number: H03H3/08 H10N30/40 H03H2003/0435 H10N30/50

    Abstract: A surface acoustic wave device is disclosed. The surface acoustic wave device can include a single crystal support layer, an intermediate single crystal layer positioned over the single crystal support layer, a lithium based piezoelectric layer positioned over the intermediate single crystal layer, and an interdigital transducer electrode positioned over the lithium based piezoelectric layer, the surface acoustic wave device configured to generate a surface acoustic wave. The single crystal layer can be a quartz layer, such as a z-propagation quartz layer. A thermal conductivity of the single crystal support layer is greater than a thermal conductivity of the intermediate single crystal layer, and the thermal conductivity of the single crystal support layer is greater than a thermal conductivity of the lithium based piezoelectric layer.

    Piezoelectric element and method for manufacturing same

    公开(公告)号:US11997930B2

    公开(公告)日:2024-05-28

    申请号:US17181732

    申请日:2021-02-22

    Abstract: Form internal electrodes with a metal whose silver content is 80 percent by mass or higher, and also constitute piezoelectric ceramic layers with a piezoelectric ceramic whose primary component is an alkaline niobate having a perovskite structure and which contains at least one type of alkaline earth metal selected from calcium and barium, as well as silver, wherein the total content of the alkaline earth metal is 0.2 percent by mol or higher but lower than 2.0 percent by mol when the element content in the B sites of the alkaline niobate represents 100 percent by mol, and wherein the piezoelectric ceramic layers each contain at least one sintered grain 41 that has silver-segregated regions 42 inside and the silver-segregated regions 42 have a long diameter of 10 nm or smaller.

    PIEZOELECTRIC ELEMENT AND ACTUATOR
    7.
    发明公开

    公开(公告)号:US20240114797A1

    公开(公告)日:2024-04-04

    申请号:US18454073

    申请日:2023-08-23

    CPC classification number: H10N30/50 H10N30/206 H10N30/802 H10N30/8554

    Abstract: A piezoelectric element includes a substrate, a first electrode, a first piezoelectric film, a second electrode, a second piezoelectric film, and a third electrode, in which both the first piezoelectric film and the second piezoelectric film have spontaneous polarizations aligned in a film thickness direction and directions of the spontaneous polarizations are the same, and in a case where in a hysteresis curve of one piezoelectric film, a coercive voltage Vcf+, a coercive voltage Vcf−, |Vcf+−Vcf−|=ΔVcf, and the larger of an absolute value of Vcf+ and an absolute value of Vcf− is denoted by Vcf, and in a hysteresis curve of the other piezoelectric film, a coercive voltage Vcr+, a coercive voltage Vcr−, |Vcr+−Vcr−|=ΔVcr, and the larger of an absolute value of Vcr+ and an absolute value Vcr− is denoted by Vcr, ΔVcr

    PIEZOELECTRIC ELEMENT AND ACTUATOR
    8.
    发明公开

    公开(公告)号:US20240114796A1

    公开(公告)日:2024-04-04

    申请号:US18454072

    申请日:2023-08-23

    CPC classification number: H10N30/50 H10N30/206 H10N30/802 H10N30/8554

    Abstract: A piezoelectric element includes a substrate; and a first electrode, a first piezoelectric film, a second electrode, a second piezoelectric film, and a third electrode which are provided on the substrate in this order, in which both the first piezoelectric film and the second piezoelectric film contain a perovskite-type oxide containing Pb Zr, Ti, and M, as a main component, Pb composition ratios in the perovskite-type oxides contained in the first piezoelectric film and the second piezoelectric film are different from each other, and polarization-electric field hysteresis measured for the first piezoelectric film with the first electrode grounded and the second electrode as a drive electrode, and polarization-electric field hysteresis measured for the second piezoelectric film with the second electrode grounded and the third electrode as a drive electrode are shifted in the same electric field direction with respect to origins thereof.

    Piezoelectric actuator
    10.
    发明授权

    公开(公告)号:US11910717B2

    公开(公告)日:2024-02-20

    申请号:US17177645

    申请日:2021-02-17

    CPC classification number: H10N30/50 H10N30/2047 H10N30/874

    Abstract: A piezoelectric actuator includes an electrode layer including a trunk portion and a plurality of branch portions branched from the trunk portion. The trunk portion includes a plurality of junction points from each of which a corresponding branch portion of the plurality of branch portions are branched, an end spaced from the plurality of junction points, and a second through hole positioned between the plurality of junction points and the end of the trunk portion. A plurality of first through holes are grouped into a first group and a second group. The first group overlaps, in a first direction, a particular area defined between the end of the trunk portion and the second through hole and the second group overlaps, in the first direction, another particular area defined between the second through hole and the plurality of junction points.

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