公开(公告)号：US11839159B2

公开(公告)日：2023-12-05

申请号：US17070548

申请日：2020-10-14

Applicant: STMicroelectronics S.r.l.

Inventor： Luca Seghizzi ,  Federico Vercesi ,  Claudia Pedrini

IPC: H01L41/083 ,  H10N30/50 ,  H10N30/03 ,  H10N30/09 ,  H10N30/30

CPC classification number: H10N30/50 ,  H10N30/03 ,  H10N30/09 ,  H10N30/306

Abstract: A transducer includes a supporting body and a suspended structure mechanically coupled to the supporting body. The suspended structure has a first and a second surface opposite to one another along an axis, and is configured to oscillate in an oscillation direction having at least one component parallel to the axis. A first piezoelectric transducer is disposed on the first surface of the suspended structure, and a second piezoelectric transducer is disposed on the second surface of the suspended structure.