公开(公告)号：US20140353780A1

公开(公告)日：2014-12-04

申请号：US14288106

申请日：2014-05-27

Applicant: STMicroelectronics S.r.l.

Inventor： Matteo Perletti ,  Sebastiano Conti ,  Roberto Carminati ,  Marcella Capezzuto

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81B3/0051 ,  B81B3/0021 ,  B81B2201/0257 ,  B81C1/00158 ,  H04R19/005

Abstract: A micromechanical structure for a MEMS capacitive acoustic transducer, has: a substrate of semiconductor material; a rigid electrode, at least in part of conductive material, coupled to the substrate; a membrane, at least in part of conductive material, facing the rigid electrode and coupled to the substrate, which undergoes deformation in the presence of incident acoustic pressure waves and is arranged between the substrate and the rigid electrode and has a first surface and a second surface, in fluid communication, respectively, with a first chamber and a second chamber, the first chamber being delimited at least in part by a first wall portion and by a second wall portion formed by the substrate, and the second chamber being delimited at least in part by the rigid electrode; and a stopper element, connected between the first and second wall portions for limiting the deformations of the membrane. At least one electrode-anchorage element couples the rigid electrode to the stopper element.

Abstract translation: 用于MEMS电容式声学换能器的微机械结构具有：半导体材料的衬底; 耦合到所述衬底的至少部分导电材料的刚性电极; 至少部分导电材料的膜面向刚性电极并且耦合到衬底，所述衬底在存在入射声压波的情况下经历变形，并且布置在衬底和刚性电极之间并且具有第一表面和第二表面 分别与第一室和第二室分别流体连通的表面，第一室至少部分地由第一壁部分和由衬底形成的第二壁部分限定，并且第二室至少界定 部分由刚性电极; 以及连接在第一和第二壁部分之间以限制膜的变形的止动元件。 至少一个电极固定元件将刚性电极连接到止动元件。