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公开(公告)号:US11133424B2
公开(公告)日:2021-09-28
申请号:US16509040
申请日:2019-07-11
Applicant: STMicroelectronics S.r.l.
Inventor: Massimo Cataldo Mazzillo , Pietro Paolo Barbarino , Domenico Pierpaolo Mello , Antonella Sciuto
IPC: H01L31/0216 , H01L31/107 , H01L31/16 , H01L33/38
Abstract: An optical sensor includes a light-emitter device formed in a body of solid-state material with wide band gap having a surface. The light-emitter device includes a cathode region having a first conductivity type and an anode region having a second conductivity type. The anode region extends into the cathode region from the surface of the body. The anode region and the cathode region define a junction, and the cathode region has, near the junction, a peak defectiveness area accommodating vacancies in the crystalline structure due to non-bound ions or atoms of Group IV or VIII of the periodic table, which may include carbon, silicon, helium, argon, or neon. The vacancies are at a higher concentration with respect to mean values of vacancies in the anode region and in the cathode region. For example, the vacancies in the peak defectiveness area have a concentration of at least 1013 atoms/cm−3.