公开(公告)号：US12187604B2

公开(公告)日：2025-01-07

申请号：US17583896

申请日：2022-01-25

Applicant: STMicroelectronics S.r.l.

Inventor： Raffaele Enrico Furceri ,  Luca Molinari

IPC: B81B7/00 ,  B81B3/00 ,  G02B26/08

Abstract: Techniques to be described herein are based upon the combination of a digital lock-in amplifier approach with a numerical method to yield accurate estimations of the amplitude and phase of a sense signal obtained from a movement sensor associated with a resonant MEMS device such as a MEMS mirror. The techniques described herein are efficient from a computational point of view, in a manner which is suitable for applications in which the implementing hardware is to follow size and power consumption constraints.

公开(公告)号：US11422044B2

公开(公告)日：2022-08-23

申请号：US16877746

申请日：2020-05-19

Applicant: STMicroelectronics S.r.l.

Inventor： Marco Zamprogno ,  Andrea Barbieri ,  Pasquale Flora ,  Raffaele Enrico Furceri

IPC: G01L1/22 ,  G01B7/16 ,  G01D5/16

Abstract: A bridge driver circuit applies a bias voltage across first and second input nodes of a resistive bridge circuit configured to measure a physical property such as pressure or movement. A sensing circuit senses drive current, bias current and common mode current for the bridge driver and sums the sensed currents to generate a source current. The source current is processed to determine a normalized resistance and temperature of the resistive bridge circuit and from which a temperature dependent sensitivity of the resistive bridge circuit is determined. A voltage output at first and second output nodes of the resistive bridge circuit is processed to determine a value of the physical property. This processing further involves applying a temperature correction in response to the determined temperature dependent sensitivity.