公开(公告)号：US20230324674A1

公开(公告)日：2023-10-12

申请号：US18131085

申请日：2023-04-05

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' BONI ,  Roberto CARMINATI ,  Massimiliano MERLI ,  Carlo Luigi PRELINI ,  Tarek AFIFI AFIFI

IPC: G02B26/08 ,  B81B3/00 ,  B81C1/00

CPC classification number: G02B26/0858 ,  B81B3/007 ,  B81C1/00658 ,  B81B2201/042

Abstract: A microelectromechanical mirror device has, in a die of semiconductor material: a fixed structure defining a cavity; a tiltable structure carrying a reflecting region, elastically suspended above the cavity and having a main extension in a horizontal plane; at least one first pair of driving arms, carrying respective piezoelectric structures which can be biased to generate a driving force that causes rotation of the tiltable structure about a rotation axis parallel to a first horizontal axis of the horizontal plane; elastic suspension elements, which elastically couple the tiltable structure to the fixed structure at the rotation axis and are rigid to movements out of the horizontal plane and compliant to torsion about the rotation axis. In particular, the driving arms of the first pair are magnetically coupled to the tiltable structure to cause its rotation about the rotation axis by magnetic interaction, following biasing of the respective piezoelectric structures.