公开(公告)号：US20230128205A1

公开(公告)日：2023-04-27

申请号：US17509247

申请日：2021-10-25

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics, Inc.

Inventor： Marco GARBARINO ,  Davy CHOI ,  Francesco RIZZINI ,  Yamu HU

IPC: G01P21/00 ,  G01P1/00 ,  G01P15/125

Abstract: A microelectromechanical system (MEMS) accelerometer sensor has a mobile mass and a sensing capacitor. To self-test the sensor, a test signal having a variably controlled excitation voltage and a fixed pulse width is applied to the sensing capacitor. The leading and trailing edges of the test signal are aligned to coincide with reset phases of a sensing circuit coupled to the sensing capacitor. The variably controlled excitation voltage of the test signal is configured to cause an electrostatic force which produces a desired physical displacement of the mobile mass. During a read phase of the sensing circuit, a variation in capacitance of sensing capacitor due to the actual physical displacement of the mobile mass is sensed for comparison to the desired physical displacement.