公开(公告)号：US20210114937A1

公开(公告)日：2021-04-22

申请号：US16981089

申请日：2019-03-22

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Nobuhiro HIDAKA ,  Naoto KIMURA

IPC: C04B35/117 ,  H01L21/683 ,  C04B35/505 ,  C04B35/626 ,  C04B35/645

Abstract: A ceramic composite sintered body, including: a metal oxide as a main phase, and silicon carbide as a sub-phase, in which crystal grains of the silicon carbide are dispersed in crystal grains of the metal oxide and at crystal grain boundaries of the metal oxide, and an average crystal grain size of the silicon carbide dispersed at the crystal grain boundaries of the metal oxide is 0.30 μm or less.

公开(公告)号：US20210013081A1

公开(公告)日：2021-01-14

申请号：US17041905

申请日：2019-03-28

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Mamoru KOSAKAI ,  Nobuhiro HIDAKA ,  Naoto KIMURA ,  Hironori KUGIMOTO

IPC: H01L21/683 ,  C04B35/117 ,  H02N13/00

Abstract: A ceramic substrate made of a dielectric material including silicon carbide particles, which is used as a forming material, in which the number of the silicon carbide particles per unit area on the surface of the substrate is smaller than the number of the silicon carbide particles per unit area in a cross section of the substrate.

公开(公告)号：US20200027770A1

公开(公告)日：2020-01-23

申请号：US16497743

申请日：2018-03-26

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Nobuhiro HIDAKA ,  Naoto KIMURA

IPC: H01L21/683 ,  H01J37/32 ,  C04B35/117 ,  C04B35/645

Abstract: A composite sintered body is a ceramic composite sintered body which includes metal oxide which is a main phase, and silicon carbide which is a sub-phase, in which crystal grains of the silicon carbide are dispersed in crystal grains of the metal oxide and at crystal grain boundaries of the metal oxide, and a proportion of the crystal grains of the silicon carbide dispersed in the crystal grains of the metal oxide is 25% or more in an area ratio with respect to a total crystal grains of the silicon carbide.

公开(公告)号：US20210013082A1

公开(公告)日：2021-01-14

申请号：US17041935

申请日：2019-03-26

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Nobuhiro HIDAKA ,  Naoto KIMURA

IPC: H01L21/683 ,  H01J37/32 ,  C04B35/117 ,  C04B35/64

Abstract: This electrostatic chuck device (1) includes a base (11) having one main surface serving as a mounting surface (19) on which a plate-shaped sample is mounted, and an electrode for electrostatic attraction (13) provided on the side opposite to the mounting surface (19) in the base (11), in which the base (11) consists of a ceramic material as a forming material, and the ceramic material contains aluminum oxide and silicon carbide as main components thereof, and has a layered graphene present at a grain boundary of the aluminum oxide.