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公开(公告)号:US20240241052A1
公开(公告)日:2024-07-18
申请号:US18560188
申请日:2021-06-09
发明人: Chongjun JIN , Yang SHEN , Kai HE , Shan XING
IPC分类号: G01N21/552 , G01N21/01 , G01N33/543 , G01N33/68
CPC分类号: G01N21/554 , G01N21/01 , G01N33/54373 , G01N33/689 , G01N2021/0112 , G01N2333/471 , G01N2800/385
摘要: A biosensor for implementing an FP-WA coupled mode includes a dielectric layer and a metal layer. The dielectric layer includes a plurality of dielectric grooves, and the plurality of dielectric grooves are periodically distributed at equal intervals. An opening width of the dielectric groove gradually decreases in a direction from a groove opening to a groove bottom. The metal layer is disposed on the dielectric layer and includes metal grooves that are in one-to-one correspondence with the dielectric grooves.