VERTICAL NOR FLASH THIN FILM TRANSISTOR STRINGS AND FABRICATION THEREOF

    公开(公告)号:US20220231040A1

    公开(公告)日:2022-07-21

    申请号:US17559101

    申请日:2021-12-22

    Abstract: A VNOR memory string includes: (a) first and second pillars embedded in multiple composite layers, each composite layer comprising an insulator layer and a conductor layer, the first and second pillars each comprising a first semiconductor material of a first conductivity; (b) a second semiconductor layer of a second conductivity type opposite the first conductivity type on the outside of third pillar also embedded in the composite layers, the third pillar contacting both the first and second pillars; and (c) a storage layer provided between the second semiconductor layer and each of the conductor layer in the composite layers.

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