公开(公告)号：US20170229294A1

公开(公告)日：2017-08-10

申请号：US15501598

申请日：2014-12-08

申请人： SURASAK SURINPHONG

发明人： SURASAK SURINPHONG

IPC分类号： H01J37/34 ,  H01J37/32

CPC分类号： H01J37/34 ,  C23C14/325 ,  C23C14/564 ,  H01J37/32055 ,  H01J37/32422 ,  H01J37/32871

摘要： A filter apparatus for arc ion evaporator used in the cathodic arc plasma deposition system according to this invention is characterized by a set of multiple straight tubes placing in parallel to one another wherein the size and/or amount of large particles, which could contaminate the plasma beam, can be controlled. The filter apparatus further comprises a set of solenoid coils which coil around the filter to generate a magnetic field to drive plasma to the targeting object or material.The filter apparatus of this present invention can reduce a number of large particles in the plasma beam and can further be designed into compacted shapes with high flexibility for adaptation in order to suit engineering demands. In addition, the filter apparatus according to this invention does not hinder the line of sight and is in consistent with the direction of plasma movement so that large number of plasma can be obtained, resulting in a reduced electrical consumption for driving the plasma and a faster deposition rate to enable quick, high volume production of quality products at a reasonable cost.