公开(公告)号：US11630026B2

公开(公告)日：2023-04-18

申请号：US17010553

申请日：2020-09-02

Applicant: SUSS MICROOPTICS SA

Inventor： Isabel Agireen ,  Katrin Schindler ,  Wilfried Noell ,  Sophiane Tournois ,  Susanne Westenhoefer

IPC: G01M11/02 ,  G01B11/14 ,  G01B11/24 ,  G01N21/896 ,  G01N21/958

Abstract: A method for assessing the quality of a multi-channel micro- and/or subwavelength-optical projection unit is disclosed. The method comprises the following steps: At least a predefined portion of the optical projection unit is illuminated so that an image is generated by at least two channels of the predefined portion of the multi-channel optical projection unit. At least one characteristic quantity is determined based on the analysis of the image, wherein a value of the characteristic quantity is associated with a characteristic feature of the projection unit, a defect of the projection unit and/or a defect class of the projection unit. The quality of the projection unit is assessed based on the at least one characteristic quantity. Moreover, a test system for assessing the quality of a multi-channel micro- and/or subwavelength-optical projection unit and a computer program are disclosed.