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公开(公告)号：US20210063863A1
公开(公告)日：2021-03-04
申请号：US17010553
申请日：2020-09-02
摘要： A method for assessing the quality of a multi-channel micro- and/or subwavelength-optical projection unit is disclosed. The method comprises the following steps: At least a predefined portion of the optical projection unit is illuminated so that an image is generated by at least two channels of the predefined portion of the multi-channel optical projection unit. At least one characteristic quantity is determined based on the analysis of the image, wherein a value of the characteristic quantity is associated with a characteristic feature of the projection unit, a defect of the projection unit and/or a defect class of the projection unit. The quality of the projection unit is assessed based on the at least one characteristic quantity. Moreover, a test system for assessing the quality of a multi-channel micro- and/or subwavelength-optical projection unit and a computer program are disclosed
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公开(公告)号：US20200348588A1
公开(公告)日：2020-11-05
申请号：US16866254
申请日：2020-05-04
发明人： Raoul KIRNER , Wilfried NOELL , Andreas NAGY
摘要： A framework for a replication device for producing nanostructured and/or microstructured components forms a gimbal suspension. In addition, a replication device is provided including such a framework. Further, a method is described for producing nanostructured and/or microstructured components by imprint lithography using a replication device.
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