专利检索 ap:("SUSS MicroTec Solutions GmbH & Co. KG") AND inv:"Uwe VOGLER" 第 1 页

1.

发明公开
Component for Manufacturing Micro- and/or Nanostructured Devices and Method of Manufacturing the Same 审中-公开

公开(公告)号：US20240228268A1

公开(公告)日：2024-07-11

申请号：US18410339

申请日：2024-01-11

申请人： SUSS MicroTec Solutions GmbH & Co. KG

发明人： Marco SARCLETTI , Uwe VOGLER

IPC分类号： B81C99/00 , B82Y40/00

CPC分类号： B81C99/002 , B82Y40/00

摘要： Disclosed is a component for manufacturing micro- and/or nanostructured devices. The component has a base body and a surface which has micro- or nanostructures which form a substantially flat support surface, and between which trenches extend with a statistical distribution, to which a vacuum can be applied. Also disclosed is a method of manufacturing such a component.